Modeling and optimization of atomic layer deposition processes on vertically aligned carbon nanotubes

• Nuri Yazdani,
• Vipin Chawla,
• Eve Edwards,
• Vanessa Wood,
• Hyung Gyu Park and
• Ivo Utke

Beilstein J. Nanotechnol. 2014, 5, 234–244, doi:10.3762/bjnano.5.25

• coatings of VACNT arrays. However, the approach can be applied to predict film conformality as a function of depth for any porous topology, including nanopores and nanowire arrays. Keywords: atomic layer deposition; vertically aligned carbon nanotubes; continuum diffusion model; conformal coating

• guidelines; titania, TiO2; Introduction Recent advances in the synthesis and processing of carbon nanotubes (CNTs) have enabled the prospect of their integration into existing technologies that exploit the high surface area of mesoporous ceramic films [1]. Over the last 10 years, ceramic coated CNTs have